Surface treatment apparatus

Details Surface treatment apparatus Surface treatment apparatus

1985-12-18

1987-09-15

Newsome, John H.

Coating apparatus

Gas or vapor deposition

With treating means

118500, 118728, C23C 1600

Patent

active

046932119

ABSTRACT:
A surface treatment apparatus is composed of a supporting die for holding a substrate thereon to heat or cool the substrate; a cover capable of advancing close to the supporting die or into point-to-point contact with the supporting die to define a treatment space over the entire upper surface of the substrate on the supporting die, said cover defining a hole for the introduction of a surface treatment agent into the treatment space; and an evacuation chamber provided on the peripheral side wall of the supporting die, whereby the surface treatment agent is allowed to flow out from the treatment space into the evacuation chamber. No substantial conduction of heat takes place from the supporting die by way of the cover. The thermal distribution of the supporting die is thus kept extremely uniform, whereby each surface treatment can be conducted uniformly. Furthermore, owing to the provision of the evacuation chamber around the supporting die, the vaporized surface treatment agent is not allowed to escape into the room. The apparatus is effective in applying an adhesion-enhancing agent to a substrate so that the adhesion of a photoresist to the substrate is facilitated.

REFERENCES:
patent: 3785853 (1974-01-01), Kirkman
patent: 4581248 (1986-04-01), Roche

Affiliated with

Also associated with

Rating

Surface treatment apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface treatment apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface treatment apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1378300