Surface treatment apparatus

Details Surface treatment apparatus Surface treatment apparatus

1984-01-24

1985-06-11

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118724, 118728, 118 501, 118620, 156643, 156646, 204298, 204192E, 427 38, B44C 122, C03C 1500, C03C 2506, C23C 1308

Patent

active

045226741

ABSTRACT:
A gas is introduced into a surface treatment chamber and is activated therein. The surface of a specimen placed in the surface treatment chamber is treated by using reactive species generated by this activation. A means of supplying controllable energy such as the energy of heat, light, or electron beams is provided in a stage preceding the surface treatment chamber so as to activate the gas beforehand. The pre-activated gas is introduced into the surface treatment chamber and is activated again therein.

REFERENCES:
patent: 4183780 (1980-01-01), McKenna et al.
patent: 4259145 (1981-03-01), Harper et al.

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