Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2007-09-18
2007-09-18
Bueker, Richard (Department: 1763)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
Reexamination Certificate
active
10615381
ABSTRACT:
A surface treating process according to the present invention, a vapor deposited film is formed from an easily oxidizable vapor-depositing material on the surface of a work by evaporating the vapor-depositing material in a state in which the vapor deposition controlling gas has been supplied to at least zones near a melting/evaporating source and the work within a treating chamber. Thus, the vapor deposited film can be formed stably on the surface of a desired work without requirement of a long time for providing a high degree of vacuum and without use of a special apparatus. In addition, the use of the surface treating process ensures that a corrosion resistance can be provided to a rare earth metal-based permanent magnet extremely liable to be oxidized, without degradation of a high magnetic characteristic of the magnet. A surface treating apparatus according to the present invention includes a melting/evaporating source for melting and evaporating a wire-shaped vapor-depositing material containing a vapor deposition controlling gas, and a member for retaining a work on which the vapor-depositing material is deposited. The melting/evaporating source and the work retaining member are disposed in a treating chamber of the surface treating chamber. The apparatus further includes a vapor-depositing material supply means for supplying the wire-shaped vapor-depositing material containing the vapor deposition controlling gas to the melting-evaporating source.
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Chinese Office Action issued Nov. 24, 2006 with translation.
Kikui Fumiaki
Kizawa Mitsuo
Nishiuchi Takeshi
Tochishita Yoshimi
Bueker Richard
Kratz Quintos & Hanson, LLP
Sumitomo Special Metals Co. Ltd.
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