Compositions – Etching or brightening compositions – Alkali metal hydroxide containing
Patent
1980-12-05
1982-07-13
Powell, William A.
Compositions
Etching or brightening compositions
Alkali metal hydroxide containing
134 34, 156647, 156662, 156665, 156668, 252156, H01L 21306, B44C 122, C03C 1500, C23F 100
Patent
active
043393403
ABSTRACT:
A surface-treating agent formed of an aqueous solution containing 0.01 to 20% by weight of trialkyl(hydroxyalkyl) ammonium hydroxide. The treating agent is adapted to be used for the effective removal of organic and inorganic contaminants deposited on the surface of intermediate semiconductor products obtained in the respective steps of manufacturing a semiconductor device and the efficient etching of a metal layer used as wiring. Further, it can be used for the elimination of those portions of a positive working photoresist film coated on the surface of the intermediate semiconductor products which are and are not exposed to a light by controlling its concentration.
REFERENCES:
patent: 2676955 (1954-04-01), Weitkamp et al.
patent: 2774759 (1956-12-01), Blackett et al.
patent: 3503890 (1970-03-01), Davisson et al.
patent: 3553143 (1971-01-01), Bauch
patent: 3767483 (1973-10-01), Tokuyama et al.
patent: 3980587 (1976-09-01), Sullivan
The Merck Index of Chemicals and Drugs, 7th Edition, 1960, published by Merck & Co., Inc., Rahway, N.J., p. 253.
Asano Masafumi
Muraoka Hisashi
Ohashi Taizo
Shimazaki Yuzo
Powell William A.
Tokyo Shibaura Electric Co. Ltd.
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