Surface texture measuring machine, leveling device for...

Measuring and testing – Surface and cutting edge testing

Reexamination Certificate

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Details

C033S551000, C033S554000, C033S555000

Reexamination Certificate

active

06745616

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a surface texture measuring machine for measuring surface roughness, waviness, profile etc., an leveling device for the surface texture measuring machine and an orientation-adjusting method of a workpiece disposed on the surface texture measuring machine, which is specifically used for correcting relative inclination between the workpiece and measurement direction of a sensor before actual measurement, the workpiece being convex or concave and having edge line such as cylindrical shape and conic shape.
2. Description of Related Art
Conventionally, a form measuring instrument for measuring surface roughness or profile of a workpiece having cylindrical shape, conic shape etc. is known.
FIGS. 17 and 18
show example workpieces of the related art (Japanese Patent Laid-Open Publication No. Hei 8-29153 to Fukuda).
The form measuring instrument has a drive means for driving a workpiece relative to a sensor, where an orientation of the workpiece rested on a stage is automatically corrected to a reference orientation (orientation in conducting actual measurement) in advance to the actual measurement, thus defining a position to center or level the workpiece.
However, the above-described form-measuring instrument requires a drive sources such as a motor for moving the stage in X-axis direction (measurement direction), Y-axis direction.(a direction orthogonal with the measurement direction on a horizontal plane) and Z-axis direction (a direction orthogonal with the measurement direction in a perpendicular plane). As a result, a space for attaching a plurality of motors is required, thus complicating the structure of the device, so that the size of the measuring machine is increased.
Further, since the measuring machine requires the plurality of motor, vibrations from respective motors can be overlapped to generate great vibration, thus impairing highly accurate measurement. For preventing the vibration, rigidity of base such as the stage has to be increased, thus further increasing the size of the device. Moreover, since the device requires the plurality of motor, the device can be expensive.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a surface texture measuring machine, an leveling device for the surface texture measuring machine and an orientation-adjusting method of workpiece of the surface texture measuring machine, where the orientation of the workpiece can be easily adjusted without impairing operability, the size and cost of the device can be reduced and highly accurate measurement is possible.
In the present invention, the above object is achieved by manually moving a workpiece orientation adjustment stage in accordance with a calculated orientation correction amount of the workpiece to adjust the orientation of the workpiece, thus accurately scanning the texture of the workpiece by the surface texture measuring machine.
More specifically, a surface texture measuring machine according to the present invention is for measuring a surface texture of a workpiece held on a workpiece orientation adjustment stage, the workpiece having an edge line and being movable in a measurement direction (X-axis direction) and in a direction (Y-axis direction) orthogonal with the X-axis direction within a horizontal plane and rotatable in a X-Y plane, the workpiece being capable of seesawing in a direction (Z-axis direction) orthogonal with the X-axis direction within a perpendicular plane, the surface texture of the workpiece being scanned by a sensor movable in the X-axis direction after adjusting orientation of the workpiece, the surface texture measuring machine is characterized in having: a measurement controller for adjusting the orientation of the workpiece; and a measurement means being controlled by the measurement controller, the measurement controller comprising: a surface texture measurement controller for measuring the surface texture of the workpiece; a X-axis coordinates input means for inputting X-axis coordinates at a measurement start point and a measurement end point in adjusting the orientation of the workpiece; a Y-axis coordinates input means for inputting Y-axis coordinates at a measurement start point and a measurement end point in adjusting the orientation of the workpiece; a swivel correction angle calculation means for calculating a swivel inclination angle (an inclination angle within the X-Y plane relative to X-axis) and a swivel correction angle from the X-axis coordinates inputted by the X-axis coordinates input means and the Y-axis coordinates inputted by the Y-axis coordinate input means; and a swivel correction angle display for displaying the swivel correction angle calculated by the swivel correction angle calculation means, the measurement means comprising: a Y-axis adjustment means for adjusting orientation of the workpiece by manually displacing the workpiece in the Y-axis direction in accordance with the swivel correction angle displayed on the swivel correction angle display; and a swivel adjustment means for manually rotating the workpiece within the X-Y plane to adjust orientation thereof.
The workpiece having edge line includes workpiece having hog-backed shape, square-pillar shape such as triangular pillar and pentagonal pillar and pyramidal shape such as triangular pyramid and pentagonal pyramid as well as cylindrical shape (solid or hollow) and conic shape.
Further, as long as the workpiece is put on the workpiece orientation adjustment stage so that edge line thereof can be seen, other workpiece having square pillar shape such as rectangular pillar and hexagonal pillar, pyramidal shape such as square pyramid and hexagonal pyramid may be measured.
Further, the edge line may be curved (for instance, when the workpiece is curved cylindrical shape) and the edge line does not necessarily continue all the length over the workpiece as long as a certain amount of length is continued.
Further, adjustment of orientation refers to align the workpiece to a reference orientation in conducting the actual measurement, which is not restricted to one orientation per one workpiece but may be a plurality of orientation. For instance, when the workpiece is cylindrical, there can be a reference orientation adapted for measuring roughness and profile along axial direction of the cylinder and another reference orientation adapted for measuring roughness and profile along radial direction of the cylinder (a direction orthogonal with the axis thereof).
Further, as the stage means, a stage for the workpiece to be rested thereon, a V-block, a vice and a clip or a combination thereof can be used.
As the Y-axis adjustment means and the swivel adjustment means, micrometer head etc. with the correction amount being digitally displayed and having a knob thereon may preferably be used so that the workpiece can be manually moved in Y-axis direction and can be manually rotated on the X-Y thus adjusting with high accuracy. However, other arrangement is possible as long as the same effect can be obtained.
According to the present invention, the workpiece having the edge line is put on the workpiece orientation adjustment stage and the workpiece orientation adjustment stage and the sensor is relatively displaced to adjust the orientation of the workpiece into the reference orientation (an orientation during actual measurement). Subsequently, surface texture of the workpiece at the reference orientation is measured.
At this time, in order to adjust the orientation of the workpiece, the orientation of the workpiece is preliminarily measured at two points on the workpiece put on the workpiece orientation adjustment stage along measurement direction. Base on the measurement result of the preliminary measurement, an error of the orientation of the workpiece relative to the reference orientation is calculated by the swivel correction calculation means, and the operator manually operates the Y-axis adjustment means and the swivel adjustment means to correct the orientation of th

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