Surface structure of AlN substrate and a process for producing t

Details Surface structure of AlN substrate and a process for producing t Surface structure of AlN substrate and a process for producing t

1987-03-09

1989-06-20

Swisher, Nancy A. B.

Stock material or miscellaneous articles

Composite

Of inorganic material

428699, 428704, 428472, B32B 1504

Patent

active

048408530

ABSTRACT:
A surface structure of AlN substrate comprising:

REFERENCES:
patent: 4540673 (1985-09-01), Takeda et al.
patent: 4578232 (1986-03-01), Huseby et al.
patent: 4591537 (1986-05-01), Aldinger et al.
patent: 4600658 (1986-07-01), Anderson et al.
patent: 4659611 (1987-04-01), Iwase et al.
patent: 4695517 (1987-09-01), Okuno et al.

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