Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1989-03-02
1990-06-05
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
G01B 1130
Patent
active
049308963
ABSTRACT:
In order to make possible a high-speed measurement of the surface structure of a sample of any shape or any weight and also to make feasible a direct observation of the surface portion requiring measurement, the surface structure measuring apparatus comprises: a laser light beam source; an objective lens collecting the laser light beam emitting from the light source onto the surface of the sample; a pair of light deflectors disposed at positions conjugate with the pupil of the objective lens, respectively, to perform two-dimensional scanning of the surface of the sample by altering the incidence angle of the laser light beam impinging onto the objective lens; an observation optical system incorporated between the objective lens and the light deflectors for the observation of the surface of the sample; focus detecting device receiving the light reflected at the surface of the sample for detecting a displacement of the surface portion of the sample requiring measurement from a predetermined focal position; and image processing and indicating device for indicating the structure of the measured surface of the sample based on the output delivered from the focus detecting device.
REFERENCES:
patent: 3589815 (1971-06-01), Hosterman
patent: 4088408 (1978-09-01), Burcher et al.
patent: 4251125 (1981-02-01), Minoura et al.
patent: 4275306 (1981-06-01), Kato et al.
patent: 4367009 (1983-01-01), Suzki
patent: 4579453 (1986-04-01), Makita
Communications, Surface Profile Measurement Using the Confocal Microscope, D. K. Hamilton and T. Wilson, pub. 28 Jan. 1982, PACS Nos.: 07.60.Pb,42,78-b, 46.30 Rc--pp. 5320-5322.
Olympus Optical Co,. Ltd.
Rosenberger Richard A.
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