Surface state inspecting system including a scanning optical sys

Details Surface state inspecting system including a scanning optical sys Surface state inspecting system including a scanning optical sys

1995-01-19

1997-01-07

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055948, 25055949, 25055941, 356237, G01N 2188, G01N 2189

Patent

active

055919855

ABSTRACT:
A surface state inspecting system includes a scanning optical system for scanning a surface to be inspected, with first light and simultaneously for scanning a diffraction grating with second light, wherein the first light and the second light have mutually different wavelengths and mutually different polarization directions, a light receiving optical system for receiving scattered light produced sidewardly from the surface and diffraction light produced sidewardly from the diffraction grating, and for superposing the received lights one upon another, and a photoelectric converting device for converting light from the light receiving optical system into an electric signal, wherein the scanning optical system and the light receiving optical system provide an optical system which is telecentric with respect to the surface to be inspected.

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