Surface skimming bulk wave generation in KTiOPO.sub.4 and its an

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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H01L 4108

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active

054481252

ABSTRACT:
Devices are disclosed for controlling high frequency signals by the generation of surface skimming bulk waves (SSBWs). The devices include (a) a bulk crystalline substrate of MTiOXO.sub.4 (M is K, Rb, Tl, Cs, and/or NH.sub.4 and X is P and/or As) having mm2 crystal symmetry and a planar-cut surface, (b) an input interdigital transducer (IDT) deposited on a signal receiving area of the substrate surface, suitable for connection to a source of electric signal and for inverse piezoelectrically generating in-plane polarized surface skimming bulk waves having a velocity in the substrate of between about 4200 m/s and 7000 m/s, (c) a second IDT deposited on a signal sending area of the substrate surface suitable for piezoelectrically generating electric output signals from said surface skimming bulk waves, and (d) an electric signal responsive device which is operably connected to the second IDT and responds to the electric output signals. Also disclosed are a method of controlling frequency of electric signals which involves piezoelectrically converting the signals into SSBWs in a substrate of MTiOXO.sub.4 and piezoelectrically detecting SSBWs from said substrate, and a method of fluid sensing which involves piezoelectrically converting input electric signals into SSBWs in a substrate of MTiOXO.sub.4 in contact with the fluid and piezoelectrically detecting from the substrate SSBWs which have been transmitted past the fluid.

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