Surface shape metric and method to quantify the surface...

Details Surface shape metric and method to quantify the surface... Surface shape metric and method to quantify the surface...

2011-04-05

2011-04-05

Nghiem, Michael P (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

C250S559240

Reexamination Certificate

active

07920986

ABSTRACT:
A method of quantifying a shape of a surface includes measuring an elevation (z) of the surface at a plurality of locations in an x-y plane of the surface. The measurement data is fit to a series expansion in terms of one or more base functions that include a series expansion fit. A vector of shape coefficients are calculated from the series expansion fit. A vector of shape coefficients are output.

REFERENCES:
patent: 4736108 (1988-04-01), Comstock et al.
Beijer et al., Warpage Minimization of the HVQFN Map Mould, 2005, 6th Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2005, pp. 168-174.

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