Surface shape measuring system

Details Surface shape measuring system Surface shape measuring system

2005-06-14

2005-06-14

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

Reexamination Certificate

active

06906809

ABSTRACT:
A grating (3) is disposed to face the measurement target surface of a measurement target object (11). A light source (1) irradiates the grating (3) with illumination light. A camera (6) captures a moire fringe image formed on the grating (3) by light passing through the grating3and reflected by the measurement target surface. A moving means (9) changes the distance (H) between the grating3and the measurement target surface. An analyzing means (8) performs an analysis process of obtaining 3-D shape information of the measurement target surface from the image picked up by the camera (6) in at least two cases in which the distance (H) is set to different values, and obtains, on the basis of the 3-D shape information in each case and the distance H, true 3-D shape information from which the measurement error caused by the inclination of the measurement target surface is eliminated.

REFERENCES:
patent: 4564295 (1986-01-01), Halioua
patent: 5307151 (1994-04-01), Hof et al.
patent: 5612786 (1997-03-01), Huber et al.
patent: 5805502 (1998-09-01), Tang et al.
patent: 58-221103 (1983-12-01), None
patent: 06-066527 (1994-03-01), None
patent: WO 92/05401 (1992-04-01), None
Tomizawa et al., “Phase Shifting Shadow Moiré Method”, Proceedings of JSPE Fall Meeting (1991), p. 677.

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