Surface shape measurement device with slit plate and single phot

Details Surface shape measurement device with slit plate and single phot Surface shape measurement device with slit plate and single phot

1995-02-14

1995-12-05

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

25055923, G01B 1100

Patent

active

054734363

ABSTRACT:
A surface shape measurement device for measuring a surface shape of a measurement subject. The device includes a scanner for scanning the surface of the measurement subject with a light point, a lens for focusing an image of the light point on the surface of the measurement subject and a slit plate arranged at a position of a focal plane of the light point and having a plurality of apertures on a locus of the image of the light point. The device further includes a photoelectric converter arranged at a position to receive the light passing through the aperture for converting the light into a pulse signal and a signal processing circuit connected to receive the pulse signal for determining a position of the light point on the surface of the measurement subject based on a time-point of generation of the pulse signal, whereby the surface shape of the measurement subject is measured based on the position determined by the signal processing circuit.

REFERENCES:
patent: 4939379 (1990-07-01), Horn

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