Surface shape measurement apparatus

Details Surface shape measurement apparatus Surface shape measurement apparatus

1984-05-17

1986-03-25

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, G01B 902

Patent

active

045779678

ABSTRACT:
A surface shape measurement apparatus of non-contact type is based upon acousto-optical scanning means for producing a pair of polarized light beams differing in frequency by a fixed amount, which are scanned twice in succession across the surface to be measured in a succession of steps, with an electrical signal being produced by heterodyne interference of the resultant reflected light. Variations in phase of this signal, produced during the first scan, are processed to derive a set of data values representing measurement errors produced during the successive steps, which are utilized to correct a set of phase measurement values obtained during the second scan. The corrected phase measurement values thus obtained are integrated to produced surface shape data, with an accuracy of approximately 0.01 .mu.m or better being attainable.

REFERENCES:
patent: 3523735 (1970-08-01), Taylor
patent: 4298283 (1981-11-01), Makosch et al.
Baronian, "Acoustooptic Bragg Diffraction Devices and Their Applications", IEEE '74 Region Six Conference, pp. 70-77, 1974.
Sommargren, "Optical Heterodyne Profilometry", Applied Optics, vol. 20, No. 4, pp. 610-618, Feb. 1981.

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