Surface sensitized chalcogenide product and process for making a

Details Surface sensitized chalcogenide product and process for making a Surface sensitized chalcogenide product and process for making a

1979-12-03

1982-02-23

Louie, Jr., Won H.

Radiation imagery chemistry: process, composition, or product th

Imaged product

430495, 430271, 430273, 430325, 430326, G03C 176, G03C 500

Patent

active

043169465

ABSTRACT:
Surface sensitization of a chalcogenide glass is achieved by depositing an extremely thin silver layer, for example, by depositing a silver halide and developing and fixing in the absence of exposure. The sensitized chalcogenide can then be exposed to light to make it etch-resistant. Further exposure reverses the etch resistance, permitting positive or negative images and permitting erasure. Microlithographic resists such as masks can be formed.

REFERENCES:
patent: 3058845 (1962-10-01), Hendricks
patent: 3637383 (1972-01-01), Hallman et al.
patent: 3996057 (1976-12-01), Kawaziri et al.
"A Novel Inorganic Photoresist Utilizing Ag Photodoping in Se-Ge Glass Films", Applied Physics Letters, vol. 29, No. 10, Nov. 15, 1976, pp. 677-679.

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