Surface scanning

Details Surface scanning Surface scanning

2008-07-08

2008-07-08

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S369000

Reexamination Certificate

active

07397553

ABSTRACT:
In one embodiment, a surface scanning system comprises a radiation directing assembly that scans a surface using a Cartesian scanning pattern; and a radiation collecting assembly that collects radiation reflected from the surface. A scattered radiation collection system is included that measures the scattered light from the surface.

REFERENCES:
patent: 4585348 (1986-04-01), Chastang
patent: 4794264 (1988-12-01), Quackenbos et al.
patent: 4870631 (1989-09-01), Stoddard
patent: 4873430 (1989-10-01), Juliana
patent: 4905311 (1990-02-01), Hino et al.
patent: 5004929 (1991-04-01), Kakinoki et al.
patent: 5017012 (1991-05-01), Merritt, Jr. et al.
patent: 5067817 (1991-11-01), Glenn
patent: 5125741 (1992-06-01), Okada et al.
patent: 5189481 (1993-02-01), Jann
patent: 5270794 (1993-12-01), Tsuji
patent: 5392116 (1995-02-01), Makosh
patent: 5416594 (1995-05-01), Gross
patent: 5604585 (1997-02-01), Johnson et al.
patent: 5608527 (1997-03-01), Valliant et al.
patent: 5610897 (1997-03-01), Yamamoto
patent: 5633747 (1997-05-01), Nikoonahad
patent: 5644562 (1997-07-01), de Groot
patent: 5737085 (1998-04-01), Zollars et al.
patent: 5798829 (1998-08-01), Vaez-Iravani
patent: 5864394 (1999-01-01), Jordan
patent: 5880838 (1999-03-01), Marx
patent: 5883714 (1999-03-01), Jann et al.
patent: 5898500 (1999-04-01), Canteloup et al.
patent: 5903342 (1999-05-01), Yatsugake
patent: 5963314 (1999-10-01), Worster et al.
patent: 5985680 (1999-11-01), Singhal
patent: 5986763 (1999-11-01), Inoue
patent: 5995226 (1999-11-01), Abe
patent: 6020966 (2000-02-01), Ausschnitt et al.
patent: 6031615 (2000-02-01), Meeks
patent: 6081325 (2000-06-01), Leslie
patent: 6091493 (2000-07-01), Stover et al.
patent: 6122046 (2000-09-01), Almogy
patent: 6130749 (2000-10-01), Meeks
patent: 6154280 (2000-11-01), Borden
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6198533 (2001-03-01), Meeks
patent: 6229610 (2001-05-01), Meeks
patent: 6268919 (2001-07-01), Meeks
patent: 6392749 (2002-05-01), Meeks
patent: 6433877 (2002-08-01), Watanabe et al.
patent: 6449036 (2002-09-01), Wollmann et al.
patent: 6515745 (2003-02-01), Vurens et al.
patent: 6556290 (2003-04-01), Maeda et al.
patent: 6617603 (2003-09-01), Ishiguro et al.
patent: 6624884 (2003-09-01), Imaino
patent: 6624894 (2003-09-01), Olszak et al.
patent: 6665078 (2003-12-01), Meeks
patent: 6678046 (2004-01-01), Opsal
patent: 6687008 (2004-02-01), Peale et al.
patent: 6690473 (2004-02-01), Stanke et al.
patent: 6704435 (2004-03-01), Imaino
patent: 6717671 (2004-04-01), Meeks
patent: 6751044 (2004-06-01), Meeks
patent: 6757056 (2004-06-01), Meeks
patent: 6781103 (2004-08-01), Lane
patent: 6804003 (2004-10-01), Wang et al.
patent: 6813034 (2004-11-01), Rosencwaig et al.
patent: 6909500 (2005-06-01), Meeks
patent: 6917433 (2005-07-01), Levy et al.
patent: 6940609 (2005-09-01), Scheiner
patent: 6956660 (2005-10-01), Meeks et al.
patent: 7019850 (2006-03-01), Finarov
patent: 7023547 (2006-04-01), Venkatasubbarao et al.
patent: 7042556 (2006-05-01), Sun
patent: 7042577 (2006-05-01), Jacob et al.
patent: 7046352 (2006-05-01), Dayal et al.
patent: 7075630 (2006-07-01), Meeks
patent: 7113284 (2006-09-01), Meeks
patent: 7161668 (2007-01-01), Meeks et al.
patent: 7161683 (2007-01-01), Weitzel
patent: 7218391 (2007-05-01), Meeks
patent: 2002/0015146 (2002-02-01), Meeks
patent: 2002/0107650 (2002-08-01), Wack et al.
patent: 2002/0145740 (2002-10-01), Meeks
patent: 2002/0163634 (2002-11-01), Meeks
patent: 2003/0025905 (2003-02-01), Meeks
patent: 2003/0179370 (2003-09-01), Goldberg et al.
patent: 2004/0017561 (2004-01-01), Meeks
patent: 2004/0046959 (2004-03-01), Meeks
patent: 2004/0130710 (2004-07-01), Hwang et al.
patent: 2004/0160604 (2004-08-01), Meeks
patent: 2004/0169850 (2004-09-01), Meeks
patent: 2004/0233419 (2004-11-01), Meeks
patent: 2005/0057747 (2005-03-01), Meeks
patent: 2005/0206888 (2005-09-01), Yoshida et al.
patent: 2006/0072106 (2006-04-01), Matsui et al.
patent: 2007/0030493 (2007-02-01), Zettler et al.
patent: 4105192 (1991-08-01), None
patent: 080540 (1983-06-01), None
patent: 03085514 (1991-04-01), None
patent: 07055702 (1995-03-01), None
patent: 10325711 (1998-12-01), None
patent: WO 9416319 (1994-07-01), None

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