Surface scanner with thin film gauge

Details Surface scanner with thin film gauge Surface scanner with thin film gauge

1993-07-20

1995-05-16

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356382, G01N 2188

Patent

active

054165946

ABSTRACT:
An optical surface scanner for semiconductor wafers and like substrates having one channel with a detector receiving collected scattered light and another channel with a detector receiving reflected light. The scattered light signal is indicative of surface haze, particle count and size, while the reflected light signals are indicative of film thickness and/or surface properties as in the case of an opaque or absorbing layer. The latter signal may be used to correct the particle count and size determination and may also be used simultaneously for thin film measurement. The reflectivity or thin film measurement signals may be used to characterize a film layer controller to improve the accuracy of the deposited thickness of the layer.

REFERENCES:
patent: 4531838 (1985-07-01), Sawamura
patent: 4601576 (1986-07-01), Galbraith
patent: 4720191 (1988-01-01), Siegel et al.
patent: 4740708 (1988-04-01), Batchelder
patent: 4865445 (1989-09-01), Kurigama et al.
patent: 4902131 (1990-02-01), Yamazaki et al.
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5125741 (1992-06-01), Okada et al.
patent: 5189481 (1993-02-01), Jann et al.

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