Surface-relief diffraction grating

Details Surface-relief diffraction grating Surface-relief diffraction grating

2009-04-07

2011-10-18

Chang, Audrey Y (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S569000

Reexamination Certificate

active

08040607

ABSTRACT:
A bilayer transmission diffraction grating having antireflection lines having rectangular cross-section over grating lines having trapezoidal cross-section is described. The process-dependent grating line profile is accounted for by characterizing the grating line profile and performing electromagnetic wave diffraction simulations, whereby a grating duty cycle is selected that results in an improvement of overall diffraction efficiency and/or reducing polarization dependent loss of a diffraction grating having the characterized grating line profile. Grooves in the substrate between the grating lines further improve diffraction efficiency and reduce polarization dependent loss. The entire grating line profile, including the antireflection line, the grating line, and the groove in the substrate between the grating lines, can be defined using a single etch mask, which reduces process and equipment related manufacturing costs.

REFERENCES:
patent: 5471344 (1995-11-01), Sugawara
patent: 5907436 (1999-05-01), Perry et al.
patent: 7019904 (2006-03-01), Shiozaki et al.
patent: 7142363 (2006-11-01), Sato et al.
patent: 7184214 (2007-02-01), Shiozaki et al.
patent: 7688512 (2010-03-01), Kittaka et al.
M. Shiozaki et al., “Novel Design of Polarization Independent Multi-layer Diffraction Grating With High Angular Dispersion”, SEI Technical Review, No. 59, pp. 27-31, Jan. 2005.

Affiliated with

Also associated with

Rating

Surface-relief diffraction grating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface-relief diffraction grating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface-relief diffraction grating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4264572