Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-03-29
2011-03-29
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C250S231140
Reexamination Certificate
active
07916305
ABSTRACT:
A surface reflection encoder scale is used with a surface reflection encoder for detecting a relative movement amount of a member for making a relative move. The surface reflection encoder scale includes a substrate of the member or a substrate provided on the member and a reflection phase grating provided on the substrate and having asperities for changing a phase of reflected diffracted light on its surface. The asperities of the phase grating are formed of a deposition film of metal silicide and chromium.
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Connolly Patrick J
Mitutoyo Corporation
Rankin , Hill & Clark LLP
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