Surface profiling using scanning force microscopy

Details Surface profiling using scanning force microscopy Surface profiling using scanning force microscopy

1993-05-03

1994-02-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250307, G01N 2186

Patent

active

052834425

ABSTRACT:
A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.

REFERENCES:
patent: 4724318 (1988-02-01), Binnig
patent: 4902892 (1990-02-01), Okayama et al.
patent: 4954704 (1990-09-01), Elings et al.
G. Binnig et al. "Atomic Force Microscope", Physical Review Lett., vol. 56, No. 9, pp. 930-933 (1986).
Y. Martin et al. "Atomic Force Microscope--Force mapping and profiling on a sub 100-Angstrom scale", J. Appl. Phys., vol. 61, No. 10, pp. 4723-4729 (1987).
"Microprobe-Based CD Measurment Tool", IBM TDB, vol. 32, No. 7, p. 168.

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