Surface profiling technique

Details Surface profiling technique Surface profiling technique

1981-08-31

1985-03-05

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, G01B 1124

Patent

active

045027854

ABSTRACT:
A narrow beam of light (26) is directed at a beamsplitter (12) at an incident angle (.theta.) thereto. A portion (28) of the beam (26) passes through the beamsplitter (12) and is reflected from a first mirror (22) while a portion (29) of the beam (26) is reflected from the beamsplitter (12) and directed onto and reflected by a second mirror (24). The beams (28, 29) reflected from the first and second mirrors (22, 24) intersect at a reference plane (R). The incident angle .theta. of the light beam (26) is then varied until the reflected beams intersect on the surface of an object (32) along the plane of symmetry of the system. The known variation of the incident angle, .DELTA..theta., provides sufficient information to determine the distance of the surface of the object (32) from the reference plane (R). The object 32 is then moved in an incremental fashion and .DELTA..theta. determined for each step to ascertain the surface profile of the object.

REFERENCES:
patent: 3347130 (1967-10-01), Seibel
patent: 3523736 (1970-08-01), Bottomley
patent: 3817619 (1974-06-01), Kawahara
patent: 3895870 (1975-07-01), Cullen et al.
patent: 4027978 (1977-06-01), Yamamoto et al.
patent: 4113389 (1978-09-01), Kaye
patent: 4125317 (1978-11-01), Gordon et al.
patent: 4147433 (1979-04-01), Drinkuth
patent: 4325639 (1982-04-01), Richter

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