Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1988-06-21
1989-12-05
Willis, Davis L.
Optics: measuring and testing
By polarized light examination
With birefringent element
356376, G01B 902
Patent
active
048846970
ABSTRACT:
The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.
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Qian Shi-Nan
Takacs Peter Z.
Belkin Leonard
Turner S. A.
Willis Davis L.
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