Surface profile measuring instrument and surface profile...

Details Surface profile measuring instrument and surface profile... Surface profile measuring instrument and surface profile...

2006-09-05

2006-09-05

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C033S503000, C033S551000, C033S554000, C033S555000, C033S556000, C033S558000, C033S559000, C033S561000

Reexamination Certificate

active

07100429

ABSTRACT:
A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory (46) that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator (51) that calculates a response variation factor (vibration inclination angle θ) that applies variation to the detection signal from the surface of the workpiece; and a profile processor (53) that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.

REFERENCES:
patent: 6307084 (2001-10-01), Matsuki et al.
patent: 100 00 250 (2000-08-01), None
patent: 100 35 714 (2001-07-01), None
patent: 0 858 015 (1998-08-01), None
patent: 2001-99639 (2001-04-01), None
patent: 2001-194105 (2001-07-01), None

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