Surface-profile measuring instrument

Details Surface-profile measuring instrument Surface-profile measuring instrument

2007-09-06

2010-02-09

Nghiem, Michael P. (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

C033S503000, C073S104000

Reexamination Certificate

active

07660688

ABSTRACT:
A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set. The correction calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit.

REFERENCES:
patent: 5832416 (1998-11-01), Anderson
patent: 5895442 (1999-04-01), Arndt
patent: 5966681 (1999-10-01), Bernhardt et al.
patent: 6044569 (2000-04-01), Ogihara et al.
patent: 6307084 (2001-10-01), Matsuki et al.
patent: 6453730 (2002-09-01), Takemura
patent: 6895359 (2005-05-01), Sakurada et al.
patent: 7100429 (2006-09-01), Matsuki et al.
patent: 7392692 (2008-07-01), Noda
patent: 2001/0008994 (2001-07-01), Omori et al.
patent: 2005/0076522 (2005-04-01), Matsuki et al.
patent: 2005/0111725 (2005-05-01), Noda et al.
patent: 2007/0056176 (2007-03-01), Matsumiya et al.
patent: 2009/0037128 (2009-02-01), Kiyotani
patent: A 05-256640 (1993-10-01), None
patent: A 07-324928 (1995-12-01), None
patent: A 2005-078571 (2005-03-01), None
patent: A 2005-181293 (2005-07-01), None

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