Surface profile measuring device and method

Optics: measuring and testing – Lamp beam direction or pattern – With lamp focusing

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Details

356209, 356212, G01B 1130

Patent

active

040171884

ABSTRACT:
An arrangement for measuring the profile of surfaces having a characteristic one-directional lay with sufficient resolution to determine the surface roughness thereof is disclosed, comprising a device for illuminating a small spot on the surface, with an image of the spot projected through an objective lens onto a large area light detector positioned to generate a signal corresponding to the total illumination produced by the image. The device also includes a second light detector which views a second image of the spot focused by the objective lens through a slit disposed perpendicularly to the direction of the surface lay. The respective detector signals are divided to produce signals corresponding to the ratio thereof, which, according to the present invention, correspond to the variations of the surface height occuring as the illuminated spot is scanned across the surface. A graphical profile of the surface may be obtained by recording these signals as a function of the scanned distance.

REFERENCES:
patent: 3536405 (1970-10-01), Flower
patent: 3606541 (1971-09-01), Sugano et al.
patent: 3663107 (1972-05-01), Denis et al.
patent: 3700903 (1972-10-01), Adler et al.
patent: 3715165 (1973-02-01), Smith
patent: 3719421 (1973-03-01), Poilleux et al.
patent: 3804521 (1974-04-01), Sprague

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