Surface profile measuring apparatus

Details Surface profile measuring apparatus Surface profile measuring apparatus

2008-08-28

2011-12-27

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S600000

Reexamination Certificate

active

08085409

ABSTRACT:
A surface profile measuring apparatus of the invention has a changing section for changing the cross section of a flux of light to be projected onto a sample by a light projecting section in measuring a surface profile of the sample. The surface profile measuring apparatus having the above arrangement enables to measure the surface profile of the sample easily and precisely, without using different kinds of measuring apparatuses.

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Figs. 8, 9A, 9B, 10A, 10B, 11A and 11B of present application filed Aug. 28, 2008 entitled “Surface Profile Measuring Apparatus,”.

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