Surface profile measurement

Details Surface profile measurement Surface profile measurement

2005-12-02

2010-11-16

Tarcza, Thomas H (Department: 3662)

Optics: measuring and testing

Range or remote distance finding

With photodetection

Reexamination Certificate

active

07834985

ABSTRACT:
An imaging system has a transmission system (2) for transmitting a modulated optical signal and a reception system (3) for receiving a received optical signal which is a reflected and delayed version of the transmitted signal. The reception system includes a controllable shutter arrangement for allowing reception in a controllable time window. A memory (4) collects reception data derived from different time windows, and a measure of distance is obtained corresponding to a maximum correlation between the received optical signal and the timing of the controllable time window. Surface profile information is derived from multiple distance measurements.The shutter arrangement enables the distance measurement (and the subsequent profile calculation) to be free from noise from other scattering sources.

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patent: WO 02/082201 (2002-10-01), None

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