Surface profile measurement

Details Surface profile measurement Surface profile measurement

2007-07-24

2007-07-24

Tarcza, Thomas H. (Department: 3662)

Optics: measuring and testing

Range or remote distance finding

Base line instrument

C356S004010, C356S005010, C356S005100

Reexamination Certificate

active

10474293

ABSTRACT:
An imaging system scans a light source output over an object to be imaged, and receives the reflected signal in a multi-region light detector, wherein different regions of the object to be imaged are imaged onto different regions of the detector by the receiving optics, and wherein different regions of the light detector can be actuated separately. The light source scanning is synchronized with the actuation of the light detector so that a region of the detector imaging the region of object being illuminated by the light source is actuated. The time of flight of light signals from the light source to the actuated portion of the detector is calculated for all scanning directions, to enable a three dimensional image of the object to be constructed.

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