Surface profile interferometer

Details Surface profile interferometer Surface profile interferometer

1982-10-22

1985-08-13

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

045346496

ABSTRACT:
In a surface profile interferometer, a test surface is illuminated by a beam having components at orthogonal directions of polarization which are focused at different axial distances so that the areas of intersection with the surface differ by a factor of ten or more, and any phase difference introduced by reflection by the surface is sensed by an interference technique. Alternatively, the beam components are focused at equal distances but are laterally separated.

REFERENCES:
patent: 4358201 (1982-11-01), Makosch
Reiter, "Polarisationsinterferometer zur Aufzeichnung von kleinen, schnellen Winkel-und-Relativbewegungen", Frequenz, vol. 29, pp. 88-91, 1975.
In Journal of Physics E, 1972 vol. 5, pp. 445 to 449, King et al. compare methods of film thickness measurement.
In Photoelectric Spectrometry Group Bulletin, No. 16, Dec. 1965, pp. 487 to 492, King reviews trends in spectropolarimeter design.

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