Surface profile and material mapper using a driver to displace t

Details Surface profile and material mapper using a driver to displace t Surface profile and material mapper using a driver to displace t

1993-11-10

1994-12-06

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, G01B 902

Patent

active

053715888

ABSTRACT:
The invention uses a heterodyne interferometer with coherent detection that uses a vibrating sample that can be used as a non-contact and non-destructive surface profiler and mapping apparatus where detailed profiles of the local slope and/or roughness of the vibrating sample are obtained in three dimensions. The invention can operate in either a heterodyne or homodyne regime with a probe that uses either i) focused optics, ii) a single mode optical fiber with an integral GRIN lens at its far end for focusing onto the sample or iii) a single-mode optical fiber with a taper at the end. Additionally, the heterodyne interferometry technique can be used for imaging birefringent objects such as semiconductor diagnostics of GaAs, InGaAs, InGaAsP, and other II-VI of III-V binary, ternary, and quaternary materials for analysis and diagnostics by using the birefringent properties of the object, and monitoring the electrical activity of biological cellular tissue.

REFERENCES:
patent: 4995726 (1991-02-01), Fujita et al.

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