Surface preparation for receiving processing treatments

Details Surface preparation for receiving processing treatments Surface preparation for receiving processing treatments

2006-01-24

2006-01-24

Rachuba, M. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S054000, C451S056000, C451S060000

Reexamination Certificate

active

06988936

ABSTRACT:
A solution for rinsing a surface that has been planarized using a chemical-mechanical planarization (“CMP”) technique. The solution may be a surfactant solution introduced following the use of a polishing solution in the CMP technique. The surfactant solution acts to clear undesirable particles from the planarized surface and also can terminate “latent” effects from the polishing solution. A cleaning solution is generally injected after the rinsing solution for additional cleaning effects. A plate covered with a textured material such a fabric is usually applied to the surface during the polishing, rinsing, or cleaning steps.

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