Surface potential sensor and processing circuit having improved

Details Surface potential sensor and processing circuit having improved Surface potential sensor and processing circuit having improved

1997-09-11

1999-11-16

Do, Diep N.

Electricity: measuring and testing

Electrostatic field

324458, 324613, 324452, G01R 2912, G01N 2760

Patent

active

059864567

ABSTRACT:
A surface potential sensor which is less affected by noise superposed on a reference source voltage than prior sensors, and hence can improve measurement accuracy with ease, and which also has higher stability against extraneous noise. The sensor includes an initial-stage input circuit comprising an FET, and a succeeding-stage amplifier circuit mainly comprising an operational amplifier for amplifying a difference between an AC component from the initial-stage input circuit and a reference source voltage. A resistor is connected between a drain of the FET constituting the initial-stage input circuit and a source voltage line to take out a signal from the FET drain. The source voltage supplied to the FET is the reference source voltage.

REFERENCES:
patent: 4267511 (1981-05-01), Suzuki et al.
patent: 5065102 (1991-11-01), Takanashi et al.
patent: 5270660 (1993-12-01), Werner, Jr. et al.
patent: 5600251 (1997-02-01), Akiyama

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