Electricity: measuring and testing – A material property using electrostatic phenomenon
Patent
1992-07-17
1993-08-31
Wieder, Kenneth A.
Electricity: measuring and testing
A material property using electrostatic phenomenon
324457, 355203, 430 48, 430 55, G01R 2912
Patent
active
052412768
ABSTRACT:
In a system for measuring a surface potential of a sample, a probe is located above. A surface of the sample with a small gap and is vibrated by a piezoelectronic element which is energized by a oscillator. A potential of the distal end of the probe is changed and is converted into an electrical signal. The surface potential is obtained from the electrical signal.
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Miyagawa Hideo
Ohta Minoru
Shirouzu Shunji
Tanaka Kuniyoshi
Kabushiki Kaisha Toshiba
Regan Maura
Wieder Kenneth A.
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