Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2005-12-22
2009-11-17
Williams, Hezron (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C850S038000
Reexamination Certificate
active
07617720
ABSTRACT:
A surface position measuring method capable of measuring a position on a soft surface accurately and rapidly (real time), with low invasiveness. The method comprises the steps of measuring the spectrum of thermal oscillation of a cantilever with the distance between a cantilever tip and a sample surface being changed, extracting a fundamental mode component (spectrum area) from the obtained spectrum of thermal oscillation, and measuring a change in the spectrum area of thermal oscillation (spectrum area) with respect to the distance. A position at which the area of the cantilever thermal oscillation spectrum begins to change is evaluated as a position on the sample surface.
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Okajima Takaharu
Tanaka Masaru
Tokumoto Hiroshi
Frank Rodney T
Meyer Jerald L.
National University Corporation Hokkaido University
Protigal Stanley N.
The Nath Law Group
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