Image analysis – Applications – Range or distance measuring
Reexamination Certificate
2009-03-06
2010-02-23
Seth, Manav (Department: 2624)
Image analysis
Applications
Range or distance measuring
C382S145000, C356S152200, C356S396000
Reexamination Certificate
active
07668343
ABSTRACT:
A measuring apparatus for measuring a position of a surface of an object while the object is scanned in a scanning direction in an X-Y plane. A detecting unit detects the position of the surface of the object in a Z direction perpendicular to the X-Y plane, a stage scans the object relative to the detecting unit in the scanning direction, and a controller causes the stage to pre-scan the object relative to the detecting unit in two scanning directions, in the X-Y plane, opposite to each other, to detect, using the detecting unit, with respect to each of the two scanning directions, a position of the surface in the Z-direction for each of the same detection points on the surface, to determine, with respect to each of the two scanning directions, a reference surface based on the detected positions of the surface, to calculate an offset value, which is a difference between the detected position and a position of the reference surface in the Z-direction for each of the same detection points with respect to each of the two scanning directions, to calculate a correction value for correcting the calculated offset value in accordance with a corresponding one of the two scanning directions based on a difference, in the Z-direction, between positions of the determined reference surfaces obtained with respect to the two scanning directions.
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Kobayashi Takenobu
Kosugi Yuji
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Seth Manav
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