Surface position detection apparatus and method

Details Surface position detection apparatus and method Surface position detection apparatus and method

1997-09-30

1998-09-01

Pham, Hoa Q

Optics: measuring and testing

By polarized light examination

With light attenuation

356400, 250548, G01B 1114

Patent

active

058018352

ABSTRACT:
In an apparatus and method for surface position detection, a position of a detection surface is determined by illuminating the detection surface with detection light, receiving detection light from the detection surface, designating different parts of the detection surface in accordance with a structure within an illuminated area on the detection surface, and detecting, based on information of the received light and information of the designated parts of the detection surface, positions corresponding to the designated parts of the detection surface.

REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4595294 (1986-06-01), Ohki et al.
patent: 4823014 (1989-04-01), Miyawaki
patent: 4902900 (1990-02-01), Kamiya et al.
patent: 5124562 (1992-06-01), Kawashima et al.
patent: 5162642 (1992-11-01), Akamatsu et al.
patent: 5218415 (1993-06-01), Kawashima

Affiliated with

Also associated with

Rating

Surface position detection apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface position detection apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface position detection apparatus and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-275624