Surface position detection apparatus

Details Surface position detection apparatus Surface position detection apparatus

1994-05-09

1996-12-24

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356400, 250548, G01B 1100

Patent

active

055877940

ABSTRACT:
A surface position detection apparatus includes a projection optical system for projecting pattern light having a predetermined pattern on a detection surface from an oblique direction to the detection surface, an imaging optical system for forming an image of the pattern light reflected by the detection surface, a light-receiving-side light-shield arranged at a position substantially conjugate with the detection surface in the imaging optical system, and having an opening portion with a predetermined shape, a scanner for scanning the pattern image formed by the imaging optical system relative to the light-receiving-side light-shield, and a detection device for the pattern light into a plurality of portions, and selectively detecting at least one such portion of the pattern light.

REFERENCES:
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4595294 (1986-06-01), Ohki et al.
patent: 4823014 (1989-04-01), Miyawaki
patent: 4902900 (1990-02-01), Kamiya et al.
patent: 5124562 (1992-06-01), Kawashima et al.
patent: 5162642 (1992-11-01), Akamatsu et al.
patent: 5218415 (1993-06-01), Kawashima

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