Surface position detecting system and method

Details Surface position detecting system and method Surface position detecting system and method

2007-01-23

2007-01-23

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559300

Reexamination Certificate

active

10341384

ABSTRACT:
A surface position detecting system for detecting surface information related to a substrate. The system includes a single sensor for measuring surface positions at plural locations on the substrate, while relatively scanning the substrate, a discriminating device for discriminating, beforehand, effectiveness/ineffectiveness of the sensor during scanning measurement, on the basis of information related to substrate processing, and a calculating device for calculating, during scanning measurement, the surface information of the substrate on the basis of the surface positions measured by the sensor discriminated as being effective by the discriminating device.

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