Surface position detecting system and exposure apparatus using t

Details Surface position detecting system and exposure apparatus using t Surface position detecting system and exposure apparatus using t

1997-06-12

1999-10-19

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

2502016, G01B 1100

Patent

active

059698209

ABSTRACT:
A surface position detecting system for detecting a position of a surface of an object disposed opposed to an exposure system, with respect to a direction of an optical system of the exposure system, includes an irradiation device for projecting light to the surface of the object, obliquely with respect to the optical axis of the exposure system, a detecting device for detecting light from the surface of the object irradiated with light from the irradiation device, the detecting device detecting a position of the surface of the object with respect to the optical axis direction of the exposure system, and a light quantity adjusting device provided in at least least one of the irradiation device and the detecting device, for controlling the quantity of light passage.

REFERENCES:
patent: Re35350 (1996-10-01), Shahar et al.
patent: 4373804 (1983-02-01), Pryor et al.
patent: 5396335 (1995-03-01), Hasegawa et al.
patent: 5473166 (1995-12-01), Imai et al.
patent: 5486919 (1996-01-01), Tsuji et al.
patent: 5495336 (1996-02-01), Nose et al.
patent: 5585918 (1996-12-01), Takeuchi et al.
patent: 5652657 (1997-07-01), Yoshii et al.

Affiliated with

Also associated with

Rating

Surface position detecting system and exposure apparatus using t does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface position detecting system and exposure apparatus using t, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface position detecting system and exposure apparatus using t will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2063196