Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1993-11-19
1995-05-09
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
356400, G01B 1130
Patent
active
054145155
ABSTRACT:
A surface position detecting device including an irradiating optical system for irradiating first and second points on a surface with first and second light patterns, respectively; a light receiving optical system having an optical axis inclined with respect to the surface, for projecting upon a predetermined image plane images of the first and second light patterns on the surface, respectively, wherein the light receiving optical system includes a common primary optical and an auxiliary optical arrangement disposed between the predetermined image plane and the surface being examined, wherein the auxiliary optical arrangement includes first and second auxiliary optical systems for receiving light beams reflected respectively from the first and second points on the surface, independently of each other while the primary optical system receives both the light beams from the first and second points on the surface, and wherein a combined magnification of the primary optical system and the first auxiliary optical system is substantially equal to that of the primary optical system and the second auxiliary optical system; and a position detector for detecting positions of the images of the first and second light patterns upon the predetermined image plane.
REFERENCES:
patent: 2446628 (1948-08-01), Brown
patent: 4395117 (1983-07-01), Suzuki
patent: 4823014 (1989-04-01), Miyawaki
patent: 4874954 (1989-10-01), Takahashi et al.
patent: 4938598 (1990-07-01), Akiyama et al.
patent: 4952970 (1990-08-01), Suzuki et al.
Canon Kabushiki Kaisha
Hantis K. P.
Rosenberger Richard A.
LandOfFree
Surface position detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface position detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface position detecting device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1709989