Surface polishing apparatus including a dresser

Details Surface polishing apparatus including a dresser Surface polishing apparatus including a dresser

1998-08-27

2000-03-21

Eley, Timothy V.

Abrading

Machine

Combined

451288, 451443, B24B 704

Patent

active

060396350

ABSTRACT:
A surface polishing apparatus which presses a work piece 12 into contact with the processing surface of a disk-shaped polishing tool 11 which is rotated and driven, to polish the surface of the work piece 12 as supplying abrasive slurry to the processing surface. The surface polishing apparatus includes an abrasive slurry-supply mechanism 13 which supplies abrasive slurry to the processing surface. The slurry supply mechanism is provided on the backward side of the work piece with respect to the rotation direction of the polishing tool. A dresser 23, which sets the processing surface, is provided on the forward side of the work piece an abrasive slurry-suction mechanism, which sucks and recycles abrasive slurry from the processing surface, is provided on the forward side of the dresser and on the backward side of abrasive slurry-supply mechanism 13.

REFERENCES:
patent: 5584749 (1996-12-01), Mitsuhashi et al.
patent: 5651725 (1997-07-01), Kikuta et al.

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