Surface polishing apparatus

Details Surface polishing apparatus Surface polishing apparatus

1996-01-02

1996-12-17

Little, Willis

Abrading

Machine

Rotary tool

451 36, 451 41, 451287, B24B 100

Patent

active

055847498

ABSTRACT:
A surface polishing apparatus includes a disk-like polishing tool, a polishing solution spray mechanism, and a polishing solution suction mechanism. The polishing tool has a work surface to which a polishing solution is supplied and against which a workpiece is pressed. The polishing tool is driven/rotated to surface-polish the workpiece. The polishing solution supply mechanism is disposed on the upstream side of the workpiece in the rotational direction of the polishing tool to supply a polishing solution to the work surface of the polishing tool. The polishing solution suction mechanism is disposed on the downstream side of the workpiece in the rotational direction of the polishing tool to draw and recover the polishing solution on the work surface of the polishing tool.

REFERENCES:
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5157876 (1992-10-01), Medellin
patent: 5291693 (1994-03-01), Nguyen
patent: 5308438 (1994-05-01), Cote et al.
patent: 5421769 (1995-06-01), Schultz et al.

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