Surface particle detection using heterodyne interferometer

Details Surface particle detection using heterodyne interferometer Surface particle detection using heterodyne interferometer

1992-06-11

1994-08-30

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356237, G01B 902

Patent

active

053432908

ABSTRACT:
A heterodyne interferometer is combined with darkfield surface particle detection for improved surface particle detection sensitivity. The probe beam and the reference beam have different wavelengths. The reference beam may either be a real reference beam or a virtual reference beam. The probe beam may be incident at the surface at either a grazing angle or at an angle substantially normal to the surface. The real reference beam is incident at the surface at a grazing angle. The detection may either be conventional heterodyne detection or a combination of heterodyne and Lloyd's mirror detection.

REFERENCES:
patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4669875 (1987-06-01), Shiba et al.
patent: 4740708 (1988-04-01), Batchelder
patent: 4848908 (1989-07-01), Huang
patent: 5030842 (1991-07-01), Koshinaka et al.
G. Makosch et al., "Surface Profiling by Electro-Optical Phase Measurements", SPIE vol. 316, 1981, pp. 42-53.
"Doubly Darkfield Microscopy", IBM Technical Disclosure Bulletin, V. 30, N 6, Nov. 1987 p. 334.

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