Surface modified stamper for imprint lithography

Details Surface modified stamper for imprint lithography Surface modified stamper for imprint lithography

2007-10-09

2008-11-11

Gupta, Yogendra (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

With means applying coating material to work or work contact...

Immersion type

C425S107000, C425S403000, C425S810000

Reexamination Certificate

active

07448860

ABSTRACT:
A method of performing imprint lithography of a surface substrate includes a stamper having a thin lubricant coating thereon to facilitate release of the stamper from the imprinted surface to reduce degradation of image replication. Embodiments of the invention include stampers suitable for use in patterning servo information on magnetic recording media having a lubricant coating of from about 1 nm to about 20 nm.

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