Etching a substrate: processes – Etching and coating occur in the same processing chamber
Patent
1998-01-16
2000-03-07
Gulakowski, Randy
Etching a substrate: processes
Etching and coating occur in the same processing chamber
216 67, 216 77, 20419232, 20419235, B44C 122
Patent
active
060335823
ABSTRACT:
An irregularly etched medical implant device is provided having random non-uniform relief patterns on the surface ranging from about 0.3 .mu.m to less than about 20 .mu.m in depth. The random, irregular surface as defined by the etch micromorphology and respective dimensional properties are obtained by exposing a surface to a reactive plasma in a chamber wherein said reactive plasma produces a reaction product with the surface to thereby etch the surface, said reaction product or a complex thereof having a vapor pressure lower than a pressure in the chamber; providing a dynamic masking agent during the etching process; and removing the reaction products.
REFERENCES:
patent: 3852045 (1974-12-01), Wheeler et al.
patent: 3905777 (1975-09-01), Lacroix
patent: 3994793 (1976-11-01), Harvilchuck et al.
patent: 4203800 (1980-05-01), Kitcher et al.
patent: 4533272 (1985-08-01), Mears
patent: 4542539 (1985-09-01), Rowe, Jr. et al.
patent: 4547260 (1985-10-01), Takada et al.
patent: 4644942 (1987-02-01), Sump
patent: 4654314 (1987-03-01), Takagi et al.
patent: 4659331 (1987-04-01), Matthews et al.
patent: 4743256 (1988-05-01), Brantigan
patent: 4790851 (1988-12-01), Suire et al.
patent: 4865603 (1989-09-01), Noiles
patent: 5164331 (1992-11-01), Lin et al.
patent: 5176792 (1993-01-01), Fullowan et al.
patent: 5246530 (1993-09-01), Bugle et al.
patent: 5258098 (1993-11-01), Wagner et al.
patent: 5260093 (1993-11-01), Kamel et al.
patent: 5282861 (1994-02-01), Kaplan
patent: 5354416 (1994-10-01), Okudaira et al.
patent: 5380547 (1995-01-01), Higgins
patent: 5531862 (1996-07-01), Otsubo et al.
patent: 5843289 (1998-12-01), Lee et al.
Oehrlein, et al., "Mechanism of Silicon Surface Roughening by Reactive Ion Etching", Surface and Interface Analysis 8:243 (1986).
Hartney, et al., "Oxygen Plasma Etching for Resist Stripping and Multilayer Lithography", J. Vac. Sci. Technol. B7 (1): (Jan./Feb. 1989).
G.S. Oehrlein, Handbook of Plasma Processing Technology. Ch. 8 Reactive Ion Etching.
Chakravarthy Pramod
Lee Dosuk D.
Majahad Anthony M.
Nagras Atul
Ahmed Shamim
Etex Corporation
Gulakowski Randy
Scozzafava Mary Rose
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