Surface micromachining process for resin mold

Details Surface micromachining process for resin mold Surface micromachining process for resin mold

2005-02-01

2005-02-01

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

Utilizing shield

C451S030000

Reexamination Certificate

active

06848972

ABSTRACT:
A surface micromachining process for a resin mold including a layer of a resin as a material of the resin mold, which layer has a product's surface forming plane, and a back surface reinforcing member for reinforcing the resin layer. The product's surface forming plane is micromachined by means of at least two masking/blasting treatments. The treatments comprise a primary blasting step of sticking a first mask sheet having a specific window on the product's surface forming plane and blasting blast particles to the product's surface forming plane via the first mask sheet, and a secondary blasting step of peeling the first mask sheet, sticking a second mask sheet different from the first mask sheet on the product's surface forming plane, and blasting blast particles to the product's surface forming plane via the second mask sheet.

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