Surface-micromachined symmetrical differential pressure sensor w

Details Surface-micromachined symmetrical differential pressure sensor w Surface-micromachined symmetrical differential pressure sensor w

1996-02-12

1997-10-21

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 3612833, 3612834, G01L 912

Patent

active

056799020

ABSTRACT:
The invention is related to a symmetrical capacitive differential pressure sensor formed by depositing onto a substrate (1) using the surface-micromachining methods of semiconductor device manufacturing technology. The sensor comprises the following, entirely from each other electrically insulated thin-film layers: an at least partially conducting sensing diaphragm (5) made from polysilicon and conducting counterelectrodes (3 and 7) adapted to both sides of the sensing diaphragm (5). According to the invention, said counter-electrodes (3 and 7) are made from polysilicon thin film and comprise at least one electrically conducting area.

REFERENCES:
patent: 5316619 (1994-05-01), Mastrangelo

Affiliated with

Also associated with

Rating

Surface-micromachined symmetrical differential pressure sensor w does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface-micromachined symmetrical differential pressure sensor w, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface-micromachined symmetrical differential pressure sensor w will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1008457