Surface micromachined millimeter-scale RF system and method

Details Surface micromachined millimeter-scale RF system and method Surface micromachined millimeter-scale RF system and method

2007-03-27

2007-03-27

Nguyen, Hoang V. (Department: 2821)

Communications: radio wave antennas

Antennas

Microstrip

C343S702000, C343S846000

Reexamination Certificate

active

11145911

ABSTRACT:
A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.

REFERENCES:
patent: 6556172 (2003-04-01), Noro
patent: 6833816 (2004-12-01), Hilgers
Yoon, YK, Park, JW, and Allen, M.G., “RF MEMS Based On Epoxy-Core Conductors,” Digest from Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, Jun. 2-6, 2002, pp. 374-375.

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