Surface micromachined acoustic wave piezoelectric crystal with e

Details Surface micromachined acoustic wave piezoelectric crystal with e Surface micromachined acoustic wave piezoelectric crystal with e

1997-05-27

1998-09-29

Pascal, Robert

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310320, 310323, 310366, H03H 9205, H03H 956

Patent

active

058150544

ABSTRACT:
A high frequency acoustic wave piezoelectric device (10) having parallel etched channels cut into a surface of a piezoelectric substrate so as to form micromachined ridges (20). Top electrodes (30) are located on tops (26) of the ridges (20) and bottom electrodes (32) are located on bottoms of the channels in spacings (22) between ridges (20). The top and bottom electrodes (30, 32) are offset from each other and substantially non-opposing. The electrodes (30, 32) generate a sufficient vertical electrical field (38) when driven to cause the ridges (20) to resonate. A height (28) of the ridges (20) define the operating frequency. The ridges (20) can be made small enough to produce frequencies well over 100 MHz in a fundamental bulk acoustic wave mode.

REFERENCES:
M.J. Brady et al.; "Generation of High-Frequency Acoustic Surface Waves on Piezoelectric Wafers"; IBM Technical Disclosure Bulletin, vol. 15, No. 10, Mar. 1973, pp. 3273-3274.
"Design and Test of 3 Ghz, Fundamental Mode Surface Transverse Wave Resonators on Quartz," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 44, No. 2, Mar. 1997, pp. 399-405. Bigler.
"Wideband Bragg Cell Efficiency Enhancement Techniques," Proceedings of SPIE-The International Society for Optical Engineering, Optical Technology for Microwave Applications II; vol. 544, Apr. 9-10, 1985, pp. 72-79. Yao.

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