Surface-micromachined absolute pressure sensor and a method...

Details Surface-micromachined absolute pressure sensor and a method... Surface-micromachined absolute pressure sensor and a method...

2005-08-23

2005-08-23

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000, C359S290000

Reexamination Certificate

active

06931935

ABSTRACT:
A capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor includes at least one fixed electrode, and at least one movable electrode electrically isolated from said fixed electrode and spaced apart from said fixed electrode. A portion of said movable electrode is formed from a porous polycrystalline silicon layer that in a finished component remains as an integral portion of said flexibly movable electrode.

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