Surface micro-planarization for enhanced optical efficiency...

Details Surface micro-planarization for enhanced optical efficiency... Surface micro-planarization for enhanced optical efficiency...

2005-06-21

2005-06-21

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S048000

Reexamination Certificate

active

06908778

ABSTRACT:
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.

REFERENCES:
patent: 5504614 (1996-04-01), Webb et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5617242 (1997-04-01), Weaver
patent: 6038056 (2000-03-01), Florence et al.
patent: 6375790 (2002-04-01), Fenner
patent: 6614576 (2003-09-01), Strumpell et al.

Affiliated with

Also associated with

Rating

Surface micro-planarization for enhanced optical efficiency... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface micro-planarization for enhanced optical efficiency..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface micro-planarization for enhanced optical efficiency... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3521071